Influence of lamination parameters on mechanical properties of low temperature co-fired ceramic tapes
نویسندگان
چکیده
For the development of force sensors, manufactured in LTCC (low temperature co-fired ceramics) technology for musical wind instruments, the mechanical properties of laminated LTCC tapes were characterized. Since one layer of LTCC tape is not always fulfilling the requirements of the force sensor’s loading capacity, the influence of lamination parameters for different number of layers were investigated. The measurements were carried out with miniaturized (2 1 mm) beam samples of four different LTCC tape materials, namely Heraeus AHT01-005, AHT08-047, CT707; and CeramTec GC. The results of the measurements can be used to determine the proper LTCC tape material, the lamination pressure and the number of layers to allow the development of customized force sensors, not only for musical wind instruments. 2011 Elsevier Ltd. All rights reserved.
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 51 شماره
صفحات -
تاریخ انتشار 2011